Loading...
conference paper
Direct Etching of High Aspect structures through a Stencil
2009
Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009
Loading...
Name
villanueva_mems_2008.pdf
Access type
openaccess
Size
2.48 MB
Format
Adobe PDF
Checksum (MD5)
6e6ac64fb94a5546dfffceb8b0cb94f6