Direct Etching of High Aspect structures through a Stencil


Published in:
Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009
Presented at:
MEMS 2009, Sorrento, Italy, January 25-29, 2009
Year:
2009
Laboratories:




 Record created 2009-03-15, last modified 2018-10-01

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