Direct Etching of High Aspect structures through a Stencil
2009
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Details
Title
Direct Etching of High Aspect structures through a Stencil
Author(s)
Villanueva, G. ; Vazquez-Mena, O. ; Hibert, C. ; Brugger, J.
Published in
Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009
Conference
MEMS 2009, Sorrento, Italy, January 25-29, 2009
Date
2009
Record Appears in
Scientific production and competences > STI - School of Engineering > IGM - Institute of Mechanical Engineering > NEMS - Advanced Nano-electromechanical Systems Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-03-15