Minimized Blurring in Stencil Lithography using a Compliant Membrane


Published in:
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Presented at:
15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Denver, USA, 2009.
Year:
2009
Laboratories:




 Record created 2009-03-10, last modified 2018-03-18

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