Loading...
conference paper
Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation
2008
Symposium on Emerging Technologies for Micro-nanofabrication
Loading...
Name
Dumas_2008_JNTE.pdf
Access type
openaccess
Size
216.04 KB
Format
Adobe PDF
Checksum (MD5)
e65d53bfde3b0dd04b533f21f1b62a40