Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation


Published in:
Symposium on Emerging Technologies for Micro-nanofabrication
Presented at:
French Symposium on Emerging Technologies for Micro-nanofabrication, Toulouse, France, November 19-21, 2008
Year:
2008
Laboratories:




 Record created 2009-03-03, last modified 2018-03-17

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