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conference paper
Dynamic Stencil Lithography on Full Wafer Scale
2008
52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008)
Type
conference paper
Authors
Publication date
2008
Published in
52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008)
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Portland, Oregon | May 27–30, 2008 | |
Available on Infoscience
March 2, 2009
Use this identifier to reference this record