Dynamic Stencil Lithography on Full Wafer Scale
2008
Details
Title
Dynamic Stencil Lithography on Full Wafer Scale
Author(s)
van den Boogaart, M.A.F. ; Savu, V. ; Brugger, J.
Published in
52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008)
Conference
52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, Oregon, May 27–30, 2008
Date
2008
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2009-03-02