Resistless ion implantation of sub-micron scale features through nano-stencil

Resistless ion implantation of sub-micron scale features through nano-stencil


Presented at:
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008), Athens, Greece, September 15-18, 2008
Year:
2008
Laboratories:




 Record created 2009-03-02, last modified 2018-03-18

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