Filtre d'energie, microscope électronique à transmission et procédé de filtrage d'énergie associé
An energy filter receiving an electronic beam oriented along an optical axis. The filter includes a deflecting system which deviates in a dispersion plane not including the optical axis the received beam and a dispersing system which guides the beam sent by the deflecting system on an optical path inscribed in the dispersion plane and returning to the deflecting system. The deflecting system brings back in alignment with the optical axis the beam coming from the dispersing system. The deflecting system consists of a single element ensuring the inverse deviations of the beam whether outgoing or incoming. The invention is useful for transmission electron microscope.
9495689
Alternative title(s) : (de) Energiefilter, transmissionselektronemikroskop und dazu anwendbares energiefilterungsverfahren (fr) Filtre d'energie, microscope electronique a transmission et procede de filtrage d'energie associe (en) Energy filter, transmission electron microscope and associated method for filtering energy
DOI | Country code | Kind code | Date issued |
JP3981414 | JP | B2 | 2007-09-26 |
US6392228 | US | B1 | 2002-05-21 |
DE69705227 | DE | T2 | 2002-04-25 |
ES2157595 | ES | T3 | 2001-08-16 |
DE69705227 | DE | D1 | 2001-07-19 |
JP2001508584 | JP | A | 2001-06-26 |
EP0925599 | EP | B1 | 2001-06-13 |
EP0925599 | EP | A1 | 1999-06-30 |
FR2753303 | FR | B1 | 1998-12-04 |
WO9811593 | WO | A1 | 1998-03-19 |
FR2753303 | FR | A1 | 1998-03-13 |