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research article
Plasma depositon processes for nanocomposite TiN/SiNx coatings
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paper_447.pdf
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ca7c29a21e9e67d800910d3ee906334b
Plasma depositon processes for nanocomposite TiN/SiNx coatings
paper_447.pdf
restricted
206.53 KB
Adobe PDF
ca7c29a21e9e67d800910d3ee906334b