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conference paper
Fast Deposition of a-Si:H Layers and Solar Cells in a Large-Area (40 x40 cm2) VHF-GD Reactor
1999
MRS Proceedings
Type
conference paper
Authors
Kroll, U.
•
Fischer, D.
•
Meier, J.
•
Sansonnens, L.
•
Howling, A.
•
Shah, A.
Publication date
1999
Published in
MRS Proceedings
Volume
557
Start page
121
End page
126
Note
IMT-NE Number: 299
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 10, 2009
Use this identifier to reference this record