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conference paper
Comparison of VHF, RF and DC Plasma Excitation for a-Si:H Deposition with Hydrogen Dilution
1998
MRS Proceedings
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Name
paper_277.pdf
Access type
openaccess
Size
103.95 KB
Format
Adobe PDF
Checksum (MD5)
9b7230188d6c358eb1827681fb6d7e0b