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research article
Process-Enhancement of Hydrogen-Plasma Treatment by Argon
Type
research article
Authors
Keppner, H.
•
Kroll, U.
•
Torres, P.
•
Goetz, M.
•
Meier, J.
Publication date
1997
Volume
54
Start page
25
End page
28
Note
IMT-NE Number: 246
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 10, 2009
Use this identifier to reference this record