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conference paper
Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen
1997
MRS Proceedings
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Name
paper_237.pdf
Access type
openaccess
Size
187.16 KB
Format
Adobe PDF
Checksum (MD5)
9611163e86c25a8ff2388bc6dbf0a46f