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conference paper
Potential of VHF-Plasmas for Low-Cost Production of a-Si:H Solar Cells
1996
Technical Digest of the 9th PVSEC
Type
conference paper
Authors
Shah, A.
•
Kroll, U.
•
Keppner, H.
•
Meier, J.
•
Torres, P.
•
Fischer, D.
Publication date
1996
Published in
Technical Digest of the 9th PVSEC
Start page
267
End page
270
Note
IMT-NE Number: 230
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 10, 2009
Use this identifier to reference this record