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research article
Structural and Electrical Properties of Undoped Microcrystalline Silicon Grown by 70 MHz and 13.56 MHz PECVD
1994
Type
research article
Authors
Flückiger, R.
•
Meier, J.
•
Crovini, G.
•
Demichelis, F.
•
Giorgis, F.
•
Pirri, C.F.
•
Tresso, E.
•
Pohl, J.
•
Rigato, V.
•
Zandolin, S.
Publication date
1994
Published in
Volume
358
Start page
751
End page
756
Note
IMT-NE Number: 187
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 10, 2009
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