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research article
Very High Frequency Glow Discharge: Plasma- and Deposition Aspects
Type
research article
Authors
Keppner, H.
•
Kroll, U.
•
Meier, J.
•
Shah, A.
Publication date
1995
Published in
Volume
44-46
Start page
97
End page
126
Note
IMT-NE Number: 202
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 10, 2009
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