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conference paper
Low-power hermetically sealed on-chip plasma light source micromachined in glass
2008
Proceedings of the MEMS’08 Conference
We report on the fabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity in which electrodes are used to ignite a low power (≪500 mW) RF plasma.
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Name
LMTS-CONF-2008-004.pdf
Access type
restricted
Size
1.72 MB
Format
Adobe PDF
Checksum (MD5)
83ea20341e3f3bd1d15cde9bd9979084