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Conference paper

Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors

Nathan, A.; Yang, J.; Miyazaki, S.; Hou, J.; Flewitt, A.; Strahm, B.; Howling, A.A.; Hollenstein, Ch.
  • Presented at: Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2008 MRS Spring Meeting, San Francisco, CA, March 25-28, 2008
  • Published in: AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, vol. 1066, p. 3-14
  • Series: MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
  • : , 2008

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