conference paper
Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors
2008
Amorphous and Polycrystalline Thin-Film Silicon Science and Technology—2008
Type
conference paper
Web of Science ID
WOS:000261398700001
Author(s)
Date Issued
2008
Published in
Amorphous and Polycrystalline Thin-Film Silicon Science and Technology—2008
Series title/Series vol.
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS; 1066
Start page
3
End page
14
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
San Francisco, CA | March 25-28, 2008 | |
Available on Infoscience
January 28, 2009
Use this identifier to reference this record