Crystallinity Uniformity of Microcrystalline Silicon Thin Films Deposited in Large Area Radio Frequency Capacitively-coupled Reactors


Published in:
AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008, 1066, 3-14
Presented at:
Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2008 MRS Spring Meeting, San Francisco, CA, March 25-28, 2008
Year:
2008
Laboratories:
SPC
CRPP




 Record created 2009-01-28, last modified 2018-01-28


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