Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography
2009
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Details
Title
Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography
Author(s)
Arcamone, Julien ; Sansa, Marc ; Verd, Jaume ; Uranga, Arantxa ; Abadal, Gabriel ; Barniol, Nuria ; van den Boogaart, Marc ; Brugger, Juergen ; Perez-Murano, Francesc
Published in
Small
Volume
5
Pages
176-180
Date
2009
Publisher
Wiley-Blackwell
ISSN
1613-6810
Keywords
Other identifier(s)
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Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2009-01-28