Nanomechanical mass sensor for monitoring deposition rates through confined apertures
2009
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Details
Title
Nanomechanical mass sensor for monitoring deposition rates through confined apertures
Author(s)
Arcamone, J. ; Sansa, M. ; Verd, J. ; Uranga, A. ; Abadal, G. ; Barniol, N. ; van den Boogaart, M.A.F. ; Brugger, J. ; Perez-Murano, F.
Conference
The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Shenzhen, China, January 5-8, 2009
Date
2009
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2009-01-26