Nanomechanical mass sensor for monitoring deposition rates through confined apertures


Presented at:
The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Shenzhen, China, January 5-8, 2009
Year:
2009
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2009-01-26, last modified 2018-03-17

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