Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Dynamic stencil lithography on full wafer scale
 
research article

Dynamic stencil lithography on full wafer scale

Savu, V.  
•
van den Boogaart, M.A.F.  
•
Brugger, J.  
Show more
2008
Journal of Vacuum Science and Technology B

In this paper, the authors present a breakthrough extension of the stencil lithography tool and method. In the standard stencil lithography static mode, material is deposited through apertures in a membrane (stencil) on a substrate which is clamped to the stencil. In the novel dynamic mode, the stencil is repositioned with respect to the substrate inside the vacuum chamber and its motion is synchronized with the material deposition. This can be done either in a step-and-repeat or in a continuous mode. The authors present the first results proving the accurate x-y-z in situ positioning and movement of our stages during and in between patterning.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

Savu_2008_JVSTB.pdf

Access type

restricted

Size

432.52 KB

Format

Adobe PDF

Checksum (MD5)

59ffe365bc68e1f02cdcd3869b982087

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés