research article
An innovative micro optical element assembly robot
2001
Concerns the fabrication of miniaturized optical devices with height attachment precision. For active alignment of micro-optical elements machined with tolerances lower than the intended precision, an accurate 6-DOF robot is needed. This article describes such a structure, which is named Sixtiff. Sixtiff was first developed for the use of a new optical assembly technology, TRIMO-SMD. The robot is a hybrid serial-parallel structure composed of five linear stages and one angular stage. It has a stiff structure, without floating
Type
research article
Author(s)
Wursch, A.
Scussat, M.
Clavel, R.
Salathe, R. P.
Date Issued
2001
Publisher
Published in
Volume
14
Issue
3
Start page
1
End page
4
Subjects
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Note
7130366
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
January 20, 2009
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