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research article
Optical Reflectometry with Micrometer Resolution for the Investigation of Integrated Optical-Devices
Type
research article
Authors
Beaud, P.
•
Schutz, J.
•
Hodel, W.
•
Weber, H. P.
•
Gilgen, H. H.
•
Salathe, R. P.
Publication date
1989
Published in
Volume
25
Issue
4
Start page
755
End page
759
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
January 20, 2009
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