Uniformity of silicon microcrystallinity in large area RF capacitive reactors

• Published in: Progress in Photovoltaics, vol. 16, p. 687-691
• Publication date: 2008

Keywords: microcrystalline silicon; large area; uniformity

Reference

• CRPP-ARTICLE-2008-028
• doi:10.1002/pip.857
• View record in Web of Science

Record created on 2008-12-15, modified on 2017-05-12