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Uniformity of silicon microcrystallinity in large area RF capacitive reactors

Strahm, Benjamin ; Hollenstein, Christoph ; Howling, Alan

Published in:
Progress in Photovoltaics, 16, 687-691
Year:
2008
Keywords:
microcrystalline silicon; large area; uniformity
DOI:
10.1002/pip.857
Other identifiers:
View record in Web of Science
Laboratories:
SPC
CRPP

Record appears in:
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published



 Record created 2008-12-15, last modified 2018-09-13


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