Details
Title
Recent progress in materials issues for piezoelectric MEMS
Author(s)
Muralt, P.
Published in
Journal of the American Ceramic Society
Volume
91
Issue
5
Pages
1385-1396
Date
2008
Other identifier(s)
DAR: 12388
View record in Web of Science
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-11-03