Direct fabrication of NEMS by etching through Stencil

Direct fabrication of NEMS by etching through Stencil


Presented at:
Micro Nano cantilever Sensors 2008 (MNCS 08), Mainz, Germany, May 19-21, 2008
Year:
2008
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2008-06-02, last modified 2018-09-13

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