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conference paper not in proceedings
Application of the shaped electrode technique to a large area rectangular capacitively-coupled plasma reactor to suppress standing wave nonuniformity
2005
Type
conference paper not in proceedings
Authors
Publication date
2005
Note
AVS 52st Int. Symposium & Exhibition, Boston, USA, October 30 - November 1, 2005
Peer reviewed
REVIEWED
Event name |
Available on Infoscience
May 13, 2008
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