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conference paper
3D numerical simulation of plasma enhanced chemical vapour deposition (PPECVD) applied to large-area showerhead reactors
2005
Proc. AM-LCD04 Conference
Type
conference paper
Authors
Publication date
2005
Published in
Proc. AM-LCD04 Conference
Note
Proc. AM-LCD04 Conference, Tokyo, 25 August 2004 (2005)
Peer reviewed
REVIEWED
Event name |
Available on Infoscience
May 13, 2008
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