3D numerical simulation of plasma enhanced chemical vapour deposition (PPECVD) applied to large-area showerhead reactors


Published in:
Proc. AM-LCD04 Conference
Presented at:
AM-LCD04 Conference
Year:
2005
Note:
Proc. AM-LCD04 Conference, Tokyo, 25 August 2004 (2005)
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)