Infoscience

Conference paper

3D numerical simulation of plasma enhanced chemical vapour deposition (PPECVD) applied to large-area showerhead reactors

    Note:

    Proc. AM-LCD04 Conference, Tokyo, 25 August 2004 (2005)

    Reference

    • CRPP-CONF-2005-003

    Record created on 2008-05-13, modified on 2016-08-08

Fulltext

  • There is no available fulltext. Please contact the lab or the authors.

Related material