3D numerical simulation of plasma enhanced chemical vapour deposition (PPECVD) applied to large-area showerhead reactors
2005
Details
Title
3D numerical simulation of plasma enhanced chemical vapour deposition (PPECVD) applied to large-area showerhead reactors
Author(s)
Bondkowski, J. ; Sobbia, R. ; Sansonnens, L.
Published in
Proc. AM-LCD04 Conference
Conference
AM-LCD04 Conference
Date
2005
Note
Proc. AM-LCD04 Conference, Tokyo, 25 August 2004 (2005)
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13