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conference paper not in proceedings
Elimination of electromagnetic non-uniformities in large-area RF plasma reactors used for thin-film deposition
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Type
conference paper not in proceedings
Authors
Publication date
2004
Note
Société Suisse de Physique, SPS Annual Meeting, Neuchâtel, 4 mars 2004
Peer reviewed
REVIEWED
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Available on Infoscience
May 13, 2008