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Elimination of electromagnetic non-uniformities in large-area RF plasma reactors used for thin-film deposition

Howling, A.A. ; Sansonnens, L. ; Schmitt, J.P.M. ; Ballutaud, J. ; Schmidt, H. ; Hollenstein, Ch.

Presented at:
Société Suisse de Physique
Year:
2004
Note:
Société Suisse de Physique, SPS Annual Meeting, Neuchâtel, 4 mars 2004
Laboratories:
SPC
CRPP

Record appears in:
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published



 Record created 2008-05-13, last modified 2018-09-13


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