Infoscience

Conference paper

Elimination of electromagnetic non-uniformities in large-area RF plasma reactors used for thin-film deposition

    Note:

    Société Suisse de Physique, SPS Annual Meeting, Neuchâtel, 4 mars 2004

    Reference

    • CRPP-CONF-2004-012

    Record created on 2008-05-13, modified on 2016-08-08

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