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conference paper not in proceedings
Consequences of non-uniform RF plasma potential in large-area capacitive reactors
2003
Type
conference paper not in proceedings
Authors
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Schmitt, J.P.M.
Publication date
2003
Note
16th International Symposium on Plasma Chemistry, Taormina, Italy, June 2003
Peer reviewed
REVIEWED
Available on Infoscience
May 13, 2008
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