Consequences of non-uniform RF plasma potential in large-area capacitive reactors


Presented at:
16th International Symposium on Plasma Chemistry
Year:
2003
Note:
16th International Symposium on Plasma Chemistry, Taormina, Italy, June 2003
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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