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conference paper not in proceedings

Consequences of non-uniform RF plasma potential in large-area capacitive reactors

Ballutaud, J.  
•
Hollenstein, Ch.  
•
Howling, A.A.  
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2003
16th International Symposium on Plasma Chemistry
Type
conference paper not in proceedings
Author(s)
Ballutaud, J.  
•
Hollenstein, Ch.  
•
Howling, A.A.  
•
Sansonnens, L.  
•
Schmidt, H.  
•
Schmitt, J.P.M.
Date Issued

2003

Note

16th International Symposium on Plasma Chemistry, Taormina, Italy, June 2003

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Event name
16th International Symposium on Plasma Chemistry
Available on Infoscience
May 13, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/25152