Negative Ions Dynamics and Attachment-induced Ionization Instability in O2, CF4 and SF6 Low-pressure Modulated Capacitive RF Plasmas


Published in:
Proc. 29th EPS Conference on Controlled Fusion and Plasma Physics, 26B (2002) (P-4.027)
Presented at:
29th EPS Conference on Controlled Fusion and Plasma Physics
Year:
2002
Note:
Proc. 29th EPS Conference on Controlled Fusion and Plasma Physics, Montreux, Switzerland, June 2002, ECA Vol. 26B (2002) (P-4.027)
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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