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conference paper
Plasma Deposition of p-i-n Devices using a Single PECVD Chamber: Study of the Boron Contamination
2002
Proc. 29th EPS Conference on Controlled Fusion and Plasma Physics
Type
conference paper
Authors
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Kroll, U.
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Schönbachler, I.
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Bucher, C.
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Poppeller, M.
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Weichart, J.
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Buechel, A.
Publication date
2002
Published in
Proc. 29th EPS Conference on Controlled Fusion and Plasma Physics
Volume
26B (2002) (P-2.029)
Note
Proc. 29th EPS Conference on Controlled Fusion and Plasma Physics, Montreux, Switzerland, June 2002, ECA Vol. 26B (2002) (P-2.029)
Peer reviewed
REVIEWED
Available on Infoscience
May 13, 2008
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