Infoscience

Conference paper

RF plasma deposition uniformity on square-meter substrates

    Note:

    Proc. 27th EPS Conference on Controlled Fusion and Plasma Physics, Budapest, Hungary, 12-16 June 2000, ECA Vol. 24B, 1268-1271 (2000) (P3-122)

    Reference

    • CRPP-CONF-2000-074

    Record created on 2008-05-13, modified on 2016-08-08

Fulltext

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