RF plasma deposition uniformity on square-meter substrates


Published in:
Proc. 27th EPS Conference on Controlled Fusion and Plasma Physics, 24B
Presented at:
27th EPS Conference on Controlled Fusion and Plasma Physics
Year:
2000
Note:
Proc. 27th EPS Conference on Controlled Fusion and Plasma Physics, Budapest, Hungary, 12-16 June 2000, ECA Vol. 24B, 1268-1271 (2000) (P3-122)
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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