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conference paper not in proceedings
Insitu gas phase and particle diagnostics of hexamethyldisiloxane rf plasmas
Magni, D.
2000
Type
conference paper not in proceedings
Authors
Magni, D.
Publication date
2000
Peer reviewed
REVIEWED
Event name | Event place | Event date |
Montreux | Printemps 2000 | |
Available on Infoscience
May 13, 2008
Use this identifier to reference this record