Loading...
conference paper
Gas phase and particle diagnostics of HMDSO plasmas by infrared absorption spectroscopy
1998
MRS Proceedings
Type
conference paper
Authors
Publication date
1998
Published in
MRS Proceedings
Volume
544
Start page
65
End page
70
Peer reviewed
REVIEWED
Event name | Event place | Event date |
Boston, USA | 1998 | |
Available on Infoscience
May 13, 2008
Use this identifier to reference this record