Gas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy


Publié dans:
Proc. 41st Society of Vacuum Coaters Annual Technical Conference
Présenté à:
41st Society of Vacuum Coaters Annual Technical Conference
Année
1998
Note:
Proc. 41st Society of Vacuum Coaters Annual Technical Conference, Boston, USA, 18-23 April 1998, 327 - 332 (1998)
Laboratoires:
SPC
CRPP




 Notice créée le 2008-05-13, modifiée le 2019-02-28


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