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conference paper
Gas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy
1998
Proc. 41st Society of Vacuum Coaters Annual Technical Conference
Type
conference paper
Authors
Publication date
1998
Published in
Proc. 41st Society of Vacuum Coaters Annual Technical Conference
Note
Proc. 41st Society of Vacuum Coaters Annual Technical Conference, Boston, USA, 18-23 April 1998, 327 - 332 (1998)
Peer reviewed
REVIEWED
Available on Infoscience
May 13, 2008
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