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conference paper
Nanometer-scale silicon powders in RF silane plasmas
1997
Proc. 3rd Int. Conference on Reactive Plasmas
Type
conference paper
Authors
•
Kroesen, G.
•
•
Courteille, C.
•
•
Schwarzenbach, W.
•
Magni, D.
•
Publication date
1997
Published in
Proc. 3rd Int. Conference on Reactive Plasmas
Note
Proc. 3rd Int. Conference on Reactive Plasmas, Nara, Japan, January 1997, p. 227 (1997)
Peer reviewed
REVIEWED
Event name |
Available on Infoscience
May 13, 2008
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