Infoscience

Conference paper

Mask-edge distributions produced by 80 keV As+ ion implantation into Si

    Note:

    Proc. MRS Symposium on Microstructure evolution during irradiation, Vol. 439, 119 (1997)

    Reference

    • CRPP-CONF-1997-016

    Record created on 2008-05-13, modified on 2016-08-08

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