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conference paper
Infrared absorption spectroscopy of SiO2 deposition plasmas
1997
Proc. of the Soc. of Vacuum Coaters
Type
conference paper
Authors
Publication date
1997
Published in
Proc. of the Soc. of Vacuum Coaters
Note
Proc. of the Soc. of Vacuum Coaters, 40th Annual Technical Conference, April 1997
Peer reviewed
REVIEWED
Event name |
Available on Infoscience
May 13, 2008
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