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conference paper
Frequency effects in silane plasmas for PECVD
1992
Proc. 38th Annual AVS Symposium & Topical Conference
Type
conference paper
Authors
Publication date
1992
Published in
Proc. 38th Annual AVS Symposium & Topical Conference
Note
Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1080 (1992)
Peer reviewed
REVIEWED
Available on Infoscience
May 13, 2008
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