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  4. Frequency effects in silane plasmas for PECVD
 
conference paper

Frequency effects in silane plasmas for PECVD

Howling, A.A.  
•
Dorier, J.-L.  
•
Hollenstein, Ch.  
1992
Proc. 38th Annual AVS Symposium & Topical Conference
38th Annual AVS Symposium & Topical Conference
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Type
conference paper
Author(s)
Howling, A.A.  
Dorier, J.-L.  
Hollenstein, Ch.  
Date Issued

1992

Published in
Proc. 38th Annual AVS Symposium & Topical Conference
Note

Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1080 (1992)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Event name
38th Annual AVS Symposium & Topical Conference
Available on Infoscience
May 13, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/24262
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