Infoscience

Conference paper

Frequency effects in silane plasmas for PECVD

    Note:

    Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1080 (1992)

    Reference

    • CRPP-CONF-1992-019

    Record created on 2008-05-13, modified on 2016-08-08

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