Infoscience

Conference paper

Frequency effects in silane plasmas for PECVD

Howling, A.A.; Dorier, J.-L.; Hollenstein, Ch.
  • Presented at: 38th Annual AVS Symposium & Topical Conference
  • Published in: Proc. 38th Annual AVS Symposium & Topical Conference
  • Publication date: 1992

    Note:

    Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1080 (1992)

    Reference

    • CRPP-CONF-1992-019

    Record created on 2008-05-13, modified on 2017-05-12

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