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Frequency effects in silane plasmas for PECVD

Howling, A.A. ; Dorier, J.-L. ; Hollenstein, Ch.

Published in:
Proc. 38th Annual AVS Symposium & Topical Conference
Presented at:
38th Annual AVS Symposium & Topical Conference
Year:
1992
Note:
Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1080 (1992)
Laboratories:
SPC
CRPP

Record appears in:
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published



 Record created 2008-05-13, last modified 2018-09-13


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