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conference paper
Properties VHF plasmas related to technological aspects of a-Si:H deposition
1992
Proc. 11th Europ. Photovoltaic Solar Energy Conference
Type
conference paper
Authors
Publication date
1992
Published in
Proc. 11th Europ. Photovoltaic Solar Energy Conference
Note
Proc. 11th Europ. Photovoltaic Solar Energy Conference, Montreux, Oct. 1992
Peer reviewed
REVIEWED
Available on Infoscience
May 13, 2008
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