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Caracterisation de decharges a barrieres dielectriques atmospheriques et sub-atmospheriques et application a la deposition de couches d'oxyde de silicium

    Keywords: LRP 832

    Note:

    these EPFL 3801(07)

    Reference

    • CRPP-REPORT-2007-006

    Record created on 2008-04-18, modified on 2016-08-08

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